Title :
Model and Characterization of
Thin-Film Switching Devices
Author :
Jordan, Tyler S. ; Scott, Simon ; Leonhardt, Darin ; Custer, Joyce Olsen ; Rodenbeck, Christopher T. ; Wolfley, Steve ; Nordquist, Christopher D.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper investigates and models the dc behavior of thin-film-based switching devices. The devices are based on sputtered vanadium dioxide thin films that transition from 200 kΩ/□ at room temperature to 390 Ω/□ at temperatures above 68°C, with the transition occurring over a narrow temperature range. The device resistance is characterized over temperature and under current- and voltage-sourced electrical bias. The finite-element model predicts the device´s nonuniform switching behavior. Electrothermally heated devices show the same transition ratio and switching behavior as externally heated devices suggesting a purely electrothermal switching mechanism.
Keywords :
finite element analysis; microwave switches; thin film devices; vanadium compounds; DC behavior; VO2; current-sourced electrical bias; device nonuniform switching behavior; device resistance; electrothermal switching mechanism; electrothermally-heated devices; externally-heated devices; finite-element model; sputtered vanadium dioxide thin films; switching behavior; transition ratio; vanadium oxide thin-film switching devices; voltage-sourced electrical bias; Heating; Optical switches; Substrates; Temperature measurement; Thermal resistance; Resistive circuits; switches; thin film devices; vanadium compounds;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2014.2299549