On Improving the Performance of a Triaxis Vortex Convective Gyroscope Through Suspended Silicon Thermistors

This paper reports on a triaxis vortex convective gyroscope, in which a suspended arch-shaped silicon thermistor is proposed to improve performance by reducing the thermal-induced stress and heat dissipation to the substrate. The arch structure of the thermistor reduced the thermal-induced stress up to 88.7% compared with the clamped-clamped structure of the thermistor in our previous study. The suspended state reduced the heat dissipation to the substrate up to 32%. The experimental test results indicated that the sensitivities of the sensor for the x-axis, y-axis, and z-axis gyroscope were 0.642, 0.528, and 0.241 mV/°/s, respectively. The sensitivity improvement reached 49.65%, 56.21%, and 51.57% for each axis. The measured nonlinearity for the x-axis, y-axis, and z-axis gyroscope were 2.1%, 3.8%, and 4.5% in the range of ±100 °/s, respectively. An improvement in the linearity of 23.53%, 36.67%, and 6.25% was obtained.