Title :
Complex ceramic-polymer composite microparts made by microstereolithography
Author :
Provin, Christophe ; Monneret, Serge
Author_Institution :
Departement de Chimie Phys. des Reactions, Chem. Eng. Sch. (ENSIC), Nancy, France
fDate :
1/1/2002 12:00:00 AM
Abstract :
In this paper we deal with the use of microstereolithography (μSL) to produce solid freeform objects from computer-assisted-design files. The μSL process is derived from stereolithography, and it is based on the photopolymerization through a dynamic mask generator of successive layers of photocurable resin, which permits us to produce accurate micro-objects with high aspect ratio and curved surfaces (due to the layer-by-layer nature of the process). This technology is extended to the manufacture of ceramic-polymer composite parts. To achieve this, we add dispersed alumina powder (at a volumic percentage of 24%) and a visible photoinitiator to a low viscosity diacrylate resin. The objects we made present interesting properties for microrobotic or microfluidic applications
Keywords :
alumina; filled polymers; micromechanical devices; photolithography; polymerisation; Al2O3; MEMS; ceramic-polymer composite microparts; computer-assisted-design files; curved surfaces; dispersed alumina powder; dynamic mask generator; high aspect ratio; low viscosity diacrylate resin; microfabrication; microfluidic applications; microrobotic applications; microstereolithography; photocurable resin; photopolymerization; solid freeform objects; visible photoinitiator; Ceramics; Design automation; Etching; Machining; Manufacturing processes; Microfluidics; Powders; Resins; Solids; Stereolithography;
Journal_Title :
Electronics Packaging Manufacturing, IEEE Transactions on
DOI :
10.1109/TEPM.2002.1000484