• DocumentCode
    745526
  • Title

    Electrical conduction in double-layer P-SiO2/polymer dielectric structures

  • Author

    Lian, A. ; Martinu, L. ; Wertheimer, M.R.

  • Author_Institution
    Dept. of Eng. Phys., Ecole Polytech., Montreal, Que., Canada
  • Volume
    2
  • Issue
    1
  • fYear
    1995
  • fDate
    2/1/1995 12:00:00 AM
  • Firstpage
    62
  • Lastpage
    73
  • Abstract
    The dc electrical conduction in MI1M and MI1I2M composite specimens has been studied, where I1 is polyimide (PI) or polyester (PET), and I2 is a thin plasma deposited silicon compound film (oxide, P-SiO2, or nitride, P-SiN). The current-electric field (j(E,T)) characteristics have been measured over a wide range of E values (O⩽E⩽2×10 5 V cm-1) and temperatures (20⩽T⩽170°C). The observed transport characteristics are in broad agreement with data reported in the literature, except for PI based MI1I2M specimens, for which polarity dependent transport behavior occurs for T>60°C and E>2×103 V cm-1. The observed behavior of all specimen types can be explained in terms of protonic hopping conduction; the charge carriers are created by thermal dissociation and ionization of carboxylic acid (-COOH) groups, present in PI as several percent of unimidized polyamic acid, and in PET at chain ends. When the polarity is +MI1I2M-, the relatively abundant free protons in PI flow to the I1/I2 interface, where they can accumulate and give rise to a space charge-induced potential barrier of ~0.2 eV. By modifying Lewis´ molecular dipole model so as to include this potential barrier, we derive expressions for j(E,T) which describe the experimentally observed polarity dependence in PI rather well. The effect is not observed in PET based MI1I2M specimens on account of the much lower concentration of free protons in this polymer
  • Keywords
    MIM structures; dielectric thin films; hopping conduction; metal-insulator boundaries; plasma deposited coatings; polymer films; silicon compounds; 20 to 170 degC; DC electrical conduction; Lewis´ molecular dipole model; SiO2; double-layer structures; free protons; plasma deposited film; polarity dependence; polyester; polyimide; polymer dielectric; protonic hopping conduction; space charge-induced potential barrier; thermal dissociation; Conductive films; Plasma measurements; Plasma properties; Plasma temperature; Plasma transport processes; Polyimides; Positron emission tomography; Protons; Semiconductor films; Silicon compounds;
  • fLanguage
    English
  • Journal_Title
    Dielectrics and Electrical Insulation, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9878
  • Type

    jour

  • DOI
    10.1109/94.368681
  • Filename
    368681