Title :
Scanning microellipsometry for extraction of true topography
Author :
Holmes, R.D. ; See, C.W. ; Somekh, M.G.
Author_Institution :
Dept. of Electr. & Electron. Eng., Nottingham Univ., UK
fDate :
3/2/1995 12:00:00 AM
Abstract :
The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved
Keywords :
ellipsometry; light interferometry; measurement errors; surface topography measurement; amplitude distributions; back focal plane; optical reflection coefficient; phase distributions; scanning interferometer; scanning microellipsometry; topography measurement;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950278
