• DocumentCode
    746028
  • Title

    Continuous wave single transverse mode vertical-cavity surface-emitting lasers fabricated by helium implantation and zinc diffusion

  • Author

    Yang, Y. Jeffrey ; Bardin, T. ; Wang, Stanley C. ; Fernandez, Raul

  • Author_Institution
    Lockheed Palo Alto Res. Lab., CA, USA
  • Volume
    28
  • Issue
    3
  • fYear
    1992
  • Firstpage
    274
  • Lastpage
    276
  • Abstract
    A single transverse mode vertical-cavity surface emitting laser with moderate power has been fabricated using helium implantation and zinc diffusion. Devices with a 4 mu m diameter active region exhibited a fundamental transverse mode (TEM00) operation with a maximum continuous wave output power of 1.5 mW and a quantum efficiency as high as 70%.
  • Keywords
    diffusion in solids; helium; ion implantation; laser cavity resonators; optical workshop techniques; semiconductor doping; semiconductor junction lasers; zinc; 1.5 mW; 4 micron; 70 percent; AlAs:Zn-AlGaAs:Zn-GaAs:He; He implantation; VC-SEL; VCSEL; Zn diffusion; continuous wave; fabrication; fundamental transverse mode; moderate power; output power; quantum efficiency; semiconductor laser arrays; single transverse mode; vertical-cavity surface-emitting lasers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19920169
  • Filename
    121420
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=746028