• DocumentCode
    746619
  • Title

    An Integrated Circuit Mask Fabrication Facility for Universities

  • Author

    Schwartz, R.J. ; Ozdemir, F.S. ; Ward, E.R.

  • Volume
    14
  • Issue
    3
  • fYear
    1971
  • Firstpage
    140
  • Lastpage
    141
  • Abstract
    A brief description of the construction of an inexpensive integrated circuit mask fabrication facility is presented along with comments on operating procedures that have been found useful.
  • Keywords
    Cameras; Contacts; Costs; Education; Educational institutions; Fabrication; Laboratories; Silicon; Solid state circuit design; Solid state circuits;
  • fLanguage
    English
  • Journal_Title
    Education, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9359
  • Type

    jour

  • DOI
    10.1109/TE.1971.4320681
  • Filename
    4320681
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=746619