Effective Control of the Arc Discharge-Generated Plasma Jet by Smartly Designed Magnetic Fields

Author

Baranov, Oleg ; Jinghua Fang ; Keidar, Michael ; XinPei Lu ; Cvelbar, Uros ; Ostrikov, K.

Author_Institution

Plasma Lab., Nat. Aerosp. Univ. "KhAI", Kharkov, Ukraine

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2464

Lastpage

2465

Abstract

Control of ion current directed to a substrate is a key feature of plasma processing reactors. Magnetic field has been used to enhance the plasma setups. Two magnetic coils placed under the substrate together with the coils near the plasma source, generate magnetic traps for the plasma electrons in a vacuum chamber, to confine them and generate electric field to influence the ion motion. Images of the plasma jet patterns for different configurations of the magnetic field are presented.

Keywords

arcs (electric); magnetic traps; plasma jets; plasma materials processing; plasma sources; arc discharge-generated plasma jet; electric field; ion motion; magnetic coils; magnetic field; magnetic traps; plasma electrons; plasma jet patterns; plasma processing reactors; plasma setups; plasma source; vacuum chamber; Coils; Educational institutions; Magnetic resonance imaging; Magnetic separation; Plasma sources; Substrates; Arc discharge; magnetic field; plasma jet; surface modification; surface modification.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2323263

Filename

6846322