Title :
Optimized design and process for making a DC voltage reference based on MEMS
Author :
Kärkkäinen, Anu ; Awan, Shakil A. ; Kyynäräinen, Jukka ; Pekko, Panu ; Oja, Aarne S. ; Seppä, Heikki
Author_Institution :
VTT Inf. Technol., Finland
fDate :
4/1/2005 12:00:00 AM
Abstract :
A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.
Keywords :
capacitors; feedback; measurement standards; reference circuits; silicon-on-insulator; voltage measurement; DC voltage reference; MEMS; capacitive microelectromechanical system; capacitive sensors; improved feedback electronics; micromachining; micromechanical moving plate capacitor; silicon-on-insulator process; Capacitors; Design optimization; Feedback; Manufacturing processes; Microelectromechanical systems; Micromechanical devices; Process design; Silicon on insulator technology; Stability; Voltage; Capacitive sensors; feedback electronics; microelectromechanical systems (MEMS); micromachining; silicon-on-insulator (SOI);
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2004.843097
