• DocumentCode
    751077
  • Title

    Impact of strong quantum confinement on the performance of a highly asymmetric device structure: Monte Carlo particle-based simulation of a focused-ion-beam MOSFET

  • Author

    Knezevic, Irena ; Vasileska, Dragica Z. ; Ferry, David K.

  • Author_Institution
    Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
  • Volume
    49
  • Issue
    6
  • fYear
    2002
  • fDate
    6/1/2002 12:00:00 AM
  • Firstpage
    1019
  • Lastpage
    1026
  • Abstract
    A highly asymmetric 250 nm n-channel MOSFET, with a 70-nm p+ -implant placed at the source end of the channel (achievable by focused-ion-beam (FIB) implantation, so the device is named FIBMOS), has been simulated using a two-dimensional (2-D) coupled Monte Carlo-Poisson solver, in which quantum confinement effects have been taken into account by incorporating an effective potential scheme into the particle simulator. Although the device is a long-channel one, its performance is dictated by the highly doped p+-implant at the source end of the channel, and it is crucial to properly account for the quantum-confinement effects in transport, especially at the implant/oxide interface. We show that parameters such as threshold voltage and device transconductance are extremely sensitive to the proper treatment of quantization effects. On the other hand, the built-in electric field, due to the pronounced asymmetry caused by the presence of the p+-implant, drastically influences the carrier transport, and consequently, the device output characteristics, in particular the magnitude of the velocity overshoot effect and the low-field electron mobility
  • Keywords
    MOSFET; Monte Carlo methods; Poisson equation; focused ion beam technology; ion implantation; quantum interference phenomena; semiconductor device models; 250 nm; 2D coupled Monte Carlo-Poisson solver; FIB MOSFET; Monte Carlo particle-based simulation; built-in electric field; carrier transport; effective potential scheme; electron sheet density; focused-ion-beam implantation; highly asymmetric device structure; long-channel device; low-field electron mobility; quantization effects; strong quantum confinement effect; threshold voltage; transconductance; velocity overshoot effect; Doping; Gold; Hot carrier effects; Hot carriers; Implants; MOSFET circuits; Monte Carlo methods; Potential well; Quantization; Substrates;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2002.1003723
  • Filename
    1003723