DocumentCode :
751077
Title :
Impact of strong quantum confinement on the performance of a highly asymmetric device structure: Monte Carlo particle-based simulation of a focused-ion-beam MOSFET
Author :
Knezevic, Irena ; Vasileska, Dragica Z. ; Ferry, David K.
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Volume :
49
Issue :
6
fYear :
2002
fDate :
6/1/2002 12:00:00 AM
Firstpage :
1019
Lastpage :
1026
Abstract :
A highly asymmetric 250 nm n-channel MOSFET, with a 70-nm p+ -implant placed at the source end of the channel (achievable by focused-ion-beam (FIB) implantation, so the device is named FIBMOS), has been simulated using a two-dimensional (2-D) coupled Monte Carlo-Poisson solver, in which quantum confinement effects have been taken into account by incorporating an effective potential scheme into the particle simulator. Although the device is a long-channel one, its performance is dictated by the highly doped p+-implant at the source end of the channel, and it is crucial to properly account for the quantum-confinement effects in transport, especially at the implant/oxide interface. We show that parameters such as threshold voltage and device transconductance are extremely sensitive to the proper treatment of quantization effects. On the other hand, the built-in electric field, due to the pronounced asymmetry caused by the presence of the p+-implant, drastically influences the carrier transport, and consequently, the device output characteristics, in particular the magnitude of the velocity overshoot effect and the low-field electron mobility
Keywords :
MOSFET; Monte Carlo methods; Poisson equation; focused ion beam technology; ion implantation; quantum interference phenomena; semiconductor device models; 250 nm; 2D coupled Monte Carlo-Poisson solver; FIB MOSFET; Monte Carlo particle-based simulation; built-in electric field; carrier transport; effective potential scheme; electron sheet density; focused-ion-beam implantation; highly asymmetric device structure; long-channel device; low-field electron mobility; quantization effects; strong quantum confinement effect; threshold voltage; transconductance; velocity overshoot effect; Doping; Gold; Hot carrier effects; Hot carriers; Implants; MOSFET circuits; Monte Carlo methods; Potential well; Quantization; Substrates;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2002.1003723
Filename :
1003723
Link To Document :
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