Title :
Realization of a resonant tunneling permeable base transistor with optimized overgrown GaAs interfaces
Author :
Lind, Erik ; Wernersson, Lars-Erik ; Pietzonka, Ines ; Seifert, Werner
Author_Institution :
Dept. of Solid State Phys., Lund Univ., Sweden
fDate :
6/1/2002 12:00:00 AM
Abstract :
A resonant tunneling permeable base transistor has been realized experimentally by overgrowing a tungsten grating placed in direct vicinity to a double barrier heterostructure. In this way, we can directly modulate the tunneling current via an embedded gate. Since the quality of the overgrown interface is critical, special attention is paid to this issue, and the effect of different wet etchants prior to overgrowth is studied both by electrical measurements and by the use of an atomic force microscope. A clear dependence of the electrical properties and the crystal quality on the etchants used is found. This is a key result for the realization of our resonant tunneling device
Keywords :
III-V semiconductors; atomic force microscopy; etching; gallium arsenide; interface structure; resonant tunnelling transistors; semiconductor device measurement; surface cleaning; GaAsP-GaAs; GaAsP/GaAs double barrier resonant tunneling structure; W; atomic force microscope; crystal quality; double barrier heterostructure; electrical measurements; electrical properties dependence; embedded gate; optimized overgrown GaAs interfaces; overgrown interface quality; resonant tunneling permeable base transistor; surface cleaning; tungsten grating; tunneling current modulation; wet etchants; Atomic force microscopy; Atomic measurements; Epitaxial layers; Fabrication; Gallium arsenide; Resonant tunneling devices; Semiconductor diodes; Surface morphology; Surface treatment; Tungsten;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2002.1003746