DocumentCode
751423
Title
A methodology and model for the pull-in parameters of magnetostatic actuators
Author
Nemirovsky, Yael ; Zelniker, I. ; Degani, Ofir ; Sarusi, Gilaad
Author_Institution
Dept. of Electr. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
Volume
14
Issue
6
fYear
2005
Firstpage
1253
Lastpage
1264
Abstract
Magnetostatic actuators exhibit bistability similarly to the pull-in phenomena of electrostatic actuators. In this paper a methodology and model for the extraction of the magnetic Pull-In parameters of magnetostatic actuators are derived. The flux-controlled magnetostatic actuator is analyzed based on the energy representation and the magnetomotive force-controlled magnetostatic actuator is analyzed in the thermodynamic potential energy (or co-energy) representation. An algebraic equation, referred to as the magnetic Pull-In equation, for each of the two cases (flux-controlled and magnetomotive force-controlled actuators) is derived. By solving these Pull-In equations either analytically or numerically, the magnetic Pull-In parameters are obtained. Several case studies, covering displacement and torsion magnetic actuators, are presented and analyzed, illustrating the usefulness of the proposed methodology, its relative simplicity as well as the adaptability and practical usage in wide spectrum of magnetic actuators. [1425].
Keywords
electromagnetic actuators; linear algebra; magnetic devices; magnetostatics; microactuators; algebraic equation; electrostatic actuators; flux-controlled actuator; magnetic actuators; magnetic pull-in equation; magnetomotive force-controlled actuators; magnetostatic actuators; pull-in parameters; thermodynamic potential energy representation; Electrostatic actuators; Equations; Magnetic analysis; Magnetic flux; Magnetostatics; Micromechanical devices; Potential energy; Robustness; Silicon; Thermodynamics; Actuators; magnetic; magnetostatic; model; pull-in;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2005.859074
Filename
1549860
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