• DocumentCode
    751602
  • Title

    2006 International Conference on Simulation of Semiconductor Process and Devices

  • Volume
    14
  • Issue
    6
  • fYear
    2005
  • Firstpage
    1432
  • Lastpage
    1432
  • Abstract
    Provides notice of upcoming conference events of interest to practitioners and researchers.
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2005.862244
  • Filename
    1549877