Title :
Accurate Series-Resistance Extraction From Capacitor Using Time Domain Reflectometry
Author :
Wang, Y. ; Cheung, K.P. ; Choi, R. ; Brown, G.A. ; Lee, B.H.
Author_Institution :
Electr. & Comput. Eng., Rutgers Univ., New Brunswick, NJ
fDate :
4/1/2007 12:00:00 AM
Abstract :
For advanced CMOS technology, series resistance is an important source of error in capacitance-voltage (C-V) measurement. Independent accurate determination of series resistance is generally not possible. Recently, we introduced a new C-V measurement method using time domain reflectometry (TDR). Here, we show that the TDR method also allows series resistance to be determined independently and accurately
Keywords :
capacitance measurement; capacitors; electric resistance measurement; integrated circuit measurement; leakage currents; time-domain reflectometry; voltage measurement; MOSFET; advanced CMOS technology; capacitance-voltage measurement; capacitor series-resistance extraction; time domain reflectometry; CMOS technology; Capacitance measurement; Capacitors; Circuit testing; Current measurement; Displacement measurement; Electrical resistance measurement; Leakage current; Reflectometry; Time measurement; Capacitance; MOSFET; leakage; series resistance; thin oxide; time domain reflectometry;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2007.891751
