Title :
A novel pull-up type RF MEMS switch with low actuation voltage
Author :
Lee, Seong-Dae ; Jun, Byoung-Chul ; Kim, Sam-Dong ; Rhee, Jin-Koo
Author_Institution :
Millimeter-wave INnovation Technol., Dongguk Univ., Seoul, South Korea
Abstract :
We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50GHz, an insertion loss of 0.5dB, a return loss of 12.4dB, and an isolation of 55dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50GHz.
Keywords :
microswitches; millimetre wave devices; 0.5 dB; 12.4 dB; 120 ns; 130 ns; 4.5 V; 50 GHz; low actuation voltage; pull-up type RF MEMS switch; pull-up type radio frequency microelectromechanical system switch; switch-off transient time; switch-on transient time; Contacts; Electrostatic measurements; Insertion loss; Low voltage; Microelectromechanical systems; Micromechanical devices; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Switches; High isolation; low actuation voltage; microelectromechanical system (MEMS) switch; pull-up;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2005.860006