Title :
Analysis of a MEMS transmission line
Author :
Alastalo, Ari T ; Mattila, Tomi ; Seppã, Heikki
Author_Institution :
Microsensing, VTT Inf. Technol., Espoo, Finland
Abstract :
A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.
Keywords :
acoustic resonators; acoustic waveguides; equivalent circuits; micromechanical resonators; transmission lines; RF MEMS transmission line resonator; Si; acoustic wave propagation; acoustic waveguide; capacitive transducer; electrical equivalent model; electromechanical impedance; matched termination; microacoustic component; one-dimensional silicon rod; Acoustic signal detection; Acoustic transducers; Acoustic waveguides; Acoustic waves; Geometry; Impedance; Microelectromechanical systems; Micromechanical devices; Silicon; Transmission lines;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2003.815270
