• DocumentCode
    752926
  • Title

    In0.37Ga0.63N metal-semiconductor-metal photodetectors with recessed electrodes

  • Author

    Yu, C.L. ; Chen, C.H. ; Chang, S.J. ; Su, Y.K. ; Chen, S.C. ; Chang, P.C. ; Chen, P.C. ; Wu, M.H. ; Chen, H.C. ; Su, K.C.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    17
  • Issue
    4
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    875
  • Lastpage
    877
  • Abstract
    InGaN metal-semiconductor-metal photodetectors (MSM-PDs) with recessed electrodes were fabricated. Compared with the conventional planar MSM-PD, it was found that measured photocurrent and photocurrent-to-dark-current contrast ratio were both much larger for the MSM-PD with the recessed electrodes. With a 5-V applied bias and an incident light wavelength of 470 nm, it was found that measured responsivities were 0.144 and 0.038 A/W for the MSM-PDs with and without the recessed electrodes, respectively.
  • Keywords
    III-V semiconductors; dark conductivity; indium compounds; metal-semiconductor-metal structures; photoconductivity; photodetectors; wide band gap semiconductors; 470 nm; 5 V; In0.37Ga0.63N; InGaN metal-semiconductor-metal photodetectors; photocurrent; photocurrent-to-dark-current contrast ratio; recessed electrodes; responsivity; Chemical vapor deposition; DVD; Detectors; Electrodes; Gallium nitride; Light emitting diodes; Photoconductivity; Photodetectors; Photonic band gap; Wavelength measurement; InGaN; metal–organic chemical vapor deposition; metal–semiconductor–metal photodetectors (MSM-PDs); recessed electrodes;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2004.843251
  • Filename
    1411906