Title :
Formation of Coulomb crystals in a capacitively coupled plasma
Author :
Vyas, Vivek ; Kushner, Mark J.
Author_Institution :
Dept. of Mater. Sci. & Eng., Illinois Univ., Urbana, IL, USA
fDate :
2/1/2002 12:00:00 AM
Abstract :
Dust particle transport in low-temperature plasmas has received considerable attention due to the desire to minimize contamination of wafers during plasma processing of microelectronic devices and as their use to study nonideal plasmas. Observations of dust particles in radio frequency discharges have shown that particles form Coulomb crystals and display collective behavior. Images are presented here of Coulomb crystals simulated in a capacitively coupled discharge. An abrupt splitting of a single hexagonal lattice into two lattices occurs with increasing substrate bias
Keywords :
dusty plasmas; high-frequency discharges; plasma applications; plasma diagnostics; plasma transport processes; Coulomb crystals formation; capacitively coupled discharge; capacitively coupled plasma; collective behavior; dust particle transport; lattice splitting; low-temperature plasmas; microelectronic devices; nonideal plasmas; plasma applications; plasma processing; plasma properties; plasma sheaths; radio frequency discharges; single hexagonal lattice; substrate bias; wafer contamination minimisation; Contamination; Crystals; Dusty plasma; Lattices; Microelectronics; Plasma devices; Plasma displays; Plasma materials processing; Plasma simulation; Plasma transport processes;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003939