Title :
Dynamics of mode transitions in inductively-coupled plasmas
Author :
Ostrikov, Kostya ; Tsakadze, E. ; Ning, Jiang ; Tsakadze, Z. ; JiDong, Long ; Storer, R. ; Xu, Shuyan
Author_Institution :
Plasma Process. Lab., Nanyang Technol. Univ., Singapore
fDate :
2/1/2002 12:00:00 AM
Abstract :
The dynamics of transitions between the electrostatic and electromagnetic discharge modes of the low-frequency (460 kHz) inductively coupled plasma (LF ICP) reactor is studied. A series of images of plasma glows in Ar and N2 gases taken in the process of continuous variation of the input power confirms the discharge bistability and hysteresis. The operation regimes and parameters making the LF ICP reactor attractive for materials synthesis and processing applications are discussed
Keywords :
argon; nitrogen; plasma instability; 460 kHz; Ar; N2; discharge bistability; electromagnetic discharge modes; electrostatic discharge modes; hysteresis; inductively-coupled plasmas; low-frequency inductively coupled plasma; materials synthesis; mode transition; mode transitions; processing applications; Argon; Electrostatics; Hysteresis; Inductors; Plasma applications; Plasma materials processing; Plasma measurements; Plasma sources; Plasma stability; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003957
