Title :
Evolution of charged particle densities after laser-induced photodetachment in a strongly electronegative RF discharge
Author :
Yan, M. ; Bogaerts, A. ; Gijbels, R.
Author_Institution :
Dept. of Chem., Antwerp Univ., Belgium
fDate :
2/1/2002 12:00:00 AM
Abstract :
The temporal and spatial evolutions of charged particle densities after laser induced photodetachment in a SiH4/H2 RF discharge have been modeled by a particle-in-cell/Monte Carlo (PIC/MC) method. Two dips in the evolution of the electron density and the positive ion density, which are observed by experiments in the literature, are explained. The images indicate that the two dips occur at different moments in time
Keywords :
Monte Carlo methods; electron detachment; high-frequency discharges; plasma density; plasma light propagation; SiH4-H2; SiH4/H2; charged-particle density; electron density; ion density; laser induced photodetachment; laser-induced photodetachment; particle-in-cell/Monte Carlo method; strongly electronegative RF discharge; Chemical lasers; Couplings; Density measurement; Electrodes; Electrons; Gas lasers; Laser modes; Monte Carlo methods; Optical pulses; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003959
