DocumentCode :
753466
Title :
Metastable argon density evolution in a pulsed ICP discharge
Author :
Ramamurthi, Badri N. ; Economou, Demetre J.
Author_Institution :
Dept. of Chem. Eng., Houston Univ., TX, USA
Volume :
30
Issue :
1
fYear :
2002
fDate :
2/1/2002 12:00:00 AM
Firstpage :
152
Lastpage :
153
Abstract :
A two-dimensional self-consistent plasma fluid model was developed to study the dynamics of a pulsed power inductively coupled argon discharge. The metastable Ar*(3P0 and 3P2 levels) density evolution during a pulse is governed by volumetric reactions, giving rise to complex spatiotemporal behavior
Keywords :
argon; discharges (electric); metastable states; plasma density; plasma simulation; Ar; complex spatiotemporal behavior; inductively coupled plasma; metastable Ar density evolution; plasma reactor simulation; pulsed ICP discharge; pulsed power inductively coupled discharge; two-dimensional self-consistent plasma fluid model; volumetric reactions; Argon; Electrons; Inductors; Metastasis; Plasma applications; Plasma density; Plasma materials processing; Plasma simulation; Plasma waves; Spatiotemporal phenomena;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2002.1003969
Filename :
1003969
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=753466
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