• DocumentCode
    753466
  • Title

    Metastable argon density evolution in a pulsed ICP discharge

  • Author

    Ramamurthi, Badri N. ; Economou, Demetre J.

  • Author_Institution
    Dept. of Chem. Eng., Houston Univ., TX, USA
  • Volume
    30
  • Issue
    1
  • fYear
    2002
  • fDate
    2/1/2002 12:00:00 AM
  • Firstpage
    152
  • Lastpage
    153
  • Abstract
    A two-dimensional self-consistent plasma fluid model was developed to study the dynamics of a pulsed power inductively coupled argon discharge. The metastable Ar*(3P0 and 3P2 levels) density evolution during a pulse is governed by volumetric reactions, giving rise to complex spatiotemporal behavior
  • Keywords
    argon; discharges (electric); metastable states; plasma density; plasma simulation; Ar; complex spatiotemporal behavior; inductively coupled plasma; metastable Ar density evolution; plasma reactor simulation; pulsed ICP discharge; pulsed power inductively coupled discharge; two-dimensional self-consistent plasma fluid model; volumetric reactions; Argon; Electrons; Inductors; Metastasis; Plasma applications; Plasma density; Plasma materials processing; Plasma simulation; Plasma waves; Spatiotemporal phenomena;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2002.1003969
  • Filename
    1003969
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=753466