Title :
Different discharge regimes in a microwave cavity coupling system used for the generation of moderate pressure H2 and H2 /CH4 plasmas
Author :
Hassouni, Khaled ; Grotjohn, Timothy A. ; Gicquel, Alix
Author_Institution :
LIMHP, CNRS-UPR1311, Villetaneuse, France
fDate :
2/1/2002 12:00:00 AM
Abstract :
Simulated two-dimensional distributions of absorbed power density in a moderate pressure H2 plasma obtained using a microwave cavity coupling system are presented. In a first set of simulation, we analyze the change in the power density distribution when input power is increased at a constant pressure. Then, we investigate the evolution of this distribution when the average power density is increased by simultaneously increasing the input power and the pressure while keeping the plasma volume constant
Keywords :
discharges (electric); hydrogen; organic compounds; plasma pressure; plasma simulation; H2; absorbed power density; average power density; discharge regimes; evolution; hydrogen discharges; input power; microwave cavity coupling system; microwave cavity-coupling system; moderate pressure H2 plasmas; moderate pressure H2-CH4 plasmas; moderate pressure H2-methane plasmas; plasma simulation; plasma volume; power density distribution; pressure; self-consistent simulation; simulated two-dimensional distributions; Electromagnetic coupling; Electrons; Fault location; Inductors; Maxwell equations; Microwave generation; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003979
