Title :
Two-dimensional optical emission imaging of a XeCl discharge in a microwave resonant cavity
Author :
Anderson, S.A. ; Guibord, N. ; Delaney, M. ; Brake, M.L.
Author_Institution :
Dept. of Nucl. Eng. & Radiol. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
2/1/2002 12:00:00 AM
Abstract :
Optical emission of a XeCl excimer discharge, within a 1.2-cm diameter quartz discharge tube, excited by 2.45-GHz microwaves in an Asmussen resonant cavity, operating in the TM012 cavity mode, has been imaged onto a two-dimensional (2-D) charge-coupled device (CCD) camera. Spatial imaging of the discharge provides information on the heating regions of the cylindrical plasma as well as the contraction of the plasma diameter with increasing pressure. This technique also provides a real-time diagnostic for production of ultra-violet (UV) emission using a UV bandpass filter
Keywords :
cavity resonators; discharges (electric); excimers; optical images; plasma diagnostics; resonators; xenon compounds; 0.6 cm; 1.2 cm; 2.45 GHz; Asmussen resonant cavity; TM012 cavity mode; UV bandpass filter; UV emission production; XeCl; XeCl discharge; XeCl excimer discharge; cavity resonators; charge coupled devices; contraction; cylindrical plasma; excimers; glow discharges; heating regions; microwave excitation; microwave resonant cavity; plasma diameter; plasma pressure; quartz discharge tube; real-time diagnostic; spatial imaging; two-dimensional charge-coupled device camera; two-dimensional optical emission imaging; ultraviolet generation; Electromagnetic heating; Electron tubes; Microwave devices; Microwave imaging; Optical devices; Optical filters; Optical imaging; Plasma devices; Plasma diagnostics; Stimulated emission;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003991
