A theoretical study on field emission array for microsensors

Author

Lee, Hsien-Chung ; Huang, Ruey-Shing

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., New South Wales Univ., Sydney, NSW, Australia

Volume

39

Issue

2

fYear

1992

fDate

2/1/1992 12:00:00 AM

Firstpage

313

Lastpage

324

Abstract

The authors present results on the analysis of two generic cone-shaped and wedge-shaped emitter-array diodes. The effects of the variations in device geometrical structure on the potential distribution, electric field, and emission current are discussed. The main geometric design parameters considered are the tip-to-collector distance, the emitter tip radius of curvature, and the intertip spacing. Pressure sensors based on these diode structures with one electrode fabricated on a pressure sensitive thin diaphragm were studied. The analysis shows that a cone-shaped emitter array has a larger emission current per emitter tip, but the wedge-shaped array has better pressure sensitivity

Keywords

electron field emission; pressure transducers; vacuum microelectronics; analysis; cone-shaped emitter array; electric field; emission current; emitter tip radius; field emission array; geometric design parameters; intertip spacing; microsensors; modelling; potential distribution; pressure sensitive thin diaphragm; pressure sensitivity; pressure sensors; tip-to-collector distance; wedge-shaped emitter-array diodes; Accelerometers; Boundary conditions; Diodes; Electrodes; Field emitter arrays; Microphone arrays; Microsensors; Sensor arrays; Silicon; Tactile sensors;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.121688

Filename

121688