Theoretical investigation of surface acoustic wave in the new, three-layered structure: ZnO/AlN/diamond

Author

El Hakiki, M. ; Elmazria, O. ; Alnot, P.

Author_Institution

Lab. de Phys. des Milieux Ionises et Applications, Nancy Univ., Vandoeuvre-les-Nancy

Volume

54

Issue

3

fYear

2007

fDate

3/1/2007 12:00:00 AM

Firstpage

676

Lastpage

681

Abstract

The new layered structure, ZnO/AlN/diamond, for surface acoustic wave (SAW) devices is investigated for gigahertz-band applications. This structure combines the advantages of both piezoelectric materials, with a high electromechanical coupling coefficient (K²) of ZnO and high acoustic velocity of AlN. Theoretical results show that Rayleigh mode SAWs with large phase velocities up to 12,200 m/s and large K² from 1 to 3% were generated with this new structure

Keywords

II-VI semiconductors; III-V semiconductors; Rayleigh waves; aluminium compounds; diamond; multilayers; piezoelectric semiconductors; piezoelectricity; surface acoustic waves; wide band gap semiconductors; zinc compounds; 12200 m/s; Rayleigh mode; ZnO-AlN-C; ZnO/AlN/diamond three-layered structure; acoustic velocity; electromechanical coupling coefficient; gigahertz-band applications; phase velocity; piezoelectric materials; surface acoustic wave; Acoustic devices; Acoustic waves; Electric resistance; Equations; Frequency; Piezoelectric films; Piezoelectric materials; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide; Acoustics; Aluminum Compounds; Ceramics; Computer Simulation; Diamond; Materials Testing; Models, Chemical; Scattering, Radiation; Zinc Oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2007.291

Filename

4139348