• DocumentCode
    756056
  • Title

    Polysilicon emitters for bipolar transistors: a review and re-evaluation of theory and experiment

  • Author

    Post, Ian R C ; Ashburn, Peter ; Wolstenholme, Graham R

  • Author_Institution
    Dept. of Electron. & Comput. Sci., Southampton Univ., UK
  • Volume
    39
  • Issue
    7
  • fYear
    1992
  • fDate
    7/1/1992 12:00:00 AM
  • Firstpage
    1717
  • Lastpage
    1731
  • Abstract
    A critical review is presented of the theories proposed in the literature to explain the current gain enhancement of polysilicon emitter bipolar transistors. From these theories a simplified analytical formulation is chosen which models the blocking properties of the interface, including tunneling through the interfacial oxide, reduced grain boundary mobility at the polysilicon/silicon interface, and the potential barrier created by segregated dopant, which can all give rise to an enhanced current gain. Also modeled are the mechanisms which limit the extent of any gain enhancement, such as recombination in the single-crystal emitter, in the bulk of the polysilicon, and at the polysilicon/silicon interface. This model is then applied in an original manner to a selection of experimental data in an effort to identify the dominant current gain mechanisms in polysilicon emitter transistors as a function of a given set of fabrication conditions
  • Keywords
    bipolar transistors; grain boundaries; semiconductor device models; tunnelling; Si-Si; bipolar transistors; blocking properties; current gain enhancement; current gain mechanisms; grain boundary mobility; interfacial oxide; model; polysilicon emitter; potential barrier; segregated dopant; tunneling; Annealing; Bipolar transistors; Degradation; Fabrication; Grain boundaries; Interface states; Semiconductor process modeling; Silicon; Temperature; Tunneling;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.141239
  • Filename
    141239