Title :
Polysilicon emitters for bipolar transistors: a review and re-evaluation of theory and experiment
Author :
Post, Ian R C ; Ashburn, Peter ; Wolstenholme, Graham R
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
7/1/1992 12:00:00 AM
Abstract :
A critical review is presented of the theories proposed in the literature to explain the current gain enhancement of polysilicon emitter bipolar transistors. From these theories a simplified analytical formulation is chosen which models the blocking properties of the interface, including tunneling through the interfacial oxide, reduced grain boundary mobility at the polysilicon/silicon interface, and the potential barrier created by segregated dopant, which can all give rise to an enhanced current gain. Also modeled are the mechanisms which limit the extent of any gain enhancement, such as recombination in the single-crystal emitter, in the bulk of the polysilicon, and at the polysilicon/silicon interface. This model is then applied in an original manner to a selection of experimental data in an effort to identify the dominant current gain mechanisms in polysilicon emitter transistors as a function of a given set of fabrication conditions
Keywords :
bipolar transistors; grain boundaries; semiconductor device models; tunnelling; Si-Si; bipolar transistors; blocking properties; current gain enhancement; current gain mechanisms; grain boundary mobility; interfacial oxide; model; polysilicon emitter; potential barrier; segregated dopant; tunneling; Annealing; Bipolar transistors; Degradation; Fabrication; Grain boundaries; Interface states; Semiconductor process modeling; Silicon; Temperature; Tunneling;
Journal_Title :
Electron Devices, IEEE Transactions on