DocumentCode :
756081
Title :
Minimum inventory variability schedule with applications in semiconductor fabrication
Author :
Li, Shu ; Tang, Tom ; Collins, Donald W.
Author_Institution :
Allied-Signal Aerosp. Co., Tempe, AZ, USA
Volume :
9
Issue :
1
fYear :
1996
fDate :
2/1/1996 12:00:00 AM
Firstpage :
145
Lastpage :
149
Abstract :
A typical semiconductor wafer fab contains many different products and processes, some with small quantities, competing for resources. Each product row can contain hundreds of processing steps demanding production time of the same resource many times during the row. When this re-entry requirement is compounded with multiple product flows, short interval scheduling becomes important. Scheduling to reduce variations and to balance the whole wafer production line becomes a very complex issue. We investigate in this paper a new scheduling policy called minimum inventory variability scheduling (MIVS). This scheduling policy can significantly reduce the mean and variance of cycle-time in semiconductor fabs. The conclusions are based on the real world implementation in two major semiconductor fabs since 1990, and a simulation study of a much simplified hypothetical re-entrant network to capture the nature of semiconductor manufacturing. A discrete event simulation model was used to compare MIVS with five different popular dispatching policies (FIFO, SNQ, LNQ, RAN, and CYC) practised in wafer fabrication environments. The results gained on two factory floors and the simulation model indicate that dispatching policies have a significant impact on performance. The simulation results show that the MIVS dispatching policy demonstrated a percentage improvement over all other tested dispatching policies
Keywords :
discrete event simulation; integrated circuit manufacture; production control; semiconductor process modelling; stock control; discrete event simulation model; dispatching policies; minimum inventory variability schedule; multiple product flows; production time; re-entrant network; scheduling policy; semiconductor fabrication; simulation model; wafer fabrication environments; Discrete event simulation; Dispatching; Fabrication; Job shop scheduling; Production facilities; Radio access networks; Semiconductor device manufacture; Semiconductor device modeling; Testing; Virtual manufacturing;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/66.484296
Filename :
484296
Link To Document :
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