Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect

Author

Chun-Wei Tsai ; Hsu-Tang Chang ; Shih-Hsiang Liu ; Jui-che Tsai

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

31

Issue

24

fYear

2013

fDate

Dec.15, 2013

Firstpage

4126

Lastpage

4134

Abstract

Two different mirror pairs of 45°-assembled swing-type micro-electro-mechanical systems mirrors for optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9° and 9.8° for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.

Keywords

micromechanical devices; micromirrors; optical interconnections; MEMSCAP, Inc; SOIMUMP; magnetic actuation; magnetic beads; magnetically-actuated micromirror; magnetically-actuated swing-type MEMS mirror pair; mirror plate; mirror swing angle; optical interconnects; parallel-arrangement pair; reconfigurable optical interconnect; roof-type arrangement pair; swing-type micro-electro-mechanical systems mirrors; torsion springs; Magnetic flux; Magnetic resonance; Metals; Mirrors; Optical interconnections; Permanent magnets; Springs; 45° mirror; Magnetic actuation; magnetic beads; microelectromechanical systems; optical interconnect; reconfiguration;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2013.2288148

Filename

6651666