Title :
MEMS and NEMS: Systems, devices, and structures [Book Review]
fDate :
7/1/2003 12:00:00 AM
Keywords :
Book reviews; Cyclic redundancy check; Differential equations; Filtering; Kalman filters; Mathematical model; Micromechanical devices; Nanoelectromechanical systems; Nonlinear filters; State estimation;
Journal_Title :
Circuits and Devices Magazine, IEEE
DOI :
10.1109/MCD.2003.1217616