• DocumentCode
    7574
  • Title

    Editorial Special Section on the 2013 SEMI Advanced Semiconductor Manufacturing Conference

  • Author

    Werbaneth, Paul ; Braggin, Jennifer ; Radloff, Stefan ; Weber, Charles

  • Author_Institution
    , Independent Consultant
  • Volume
    27
  • Issue
    3
  • fYear
    2014
  • fDate
    Aug. 2014
  • Firstpage
    313
  • Lastpage
    315
  • Abstract
    The papers in this special section were presented at the 2013 Advanced Semiconductor Conference (ASMC).
  • Keywords
    Data mining; Meetings; Semiconductor device manufacture; Semiconductor devices; Special issues and sections; Wafer scale integration;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2014.2338391
  • Filename
    6869109
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=7574