Title :
Capacitance estimate for electrostatically actuated narrow microbeams
Author :
Batra, R.C. ; Porfiri, M. ; Spinello, D.
Author_Institution :
Dept. of Eng. Sci. & Mech., State Univ., Virginia Polytech. Inst., VA
fDate :
12/1/2006 12:00:00 AM
Abstract :
A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section
Keywords :
beams (structures); capacitance measurement; micromechanical devices; capacitance; electrostatically actuated narrow microbeam; least square fitting data; line-to-ground capacitance; microbeam cross-section; pull-in instability parameters;
Journal_Title :
Micro & Nano Letters, IET
