Surface-micromachined components for articulated microrobots

Author

Yeh, Richard ; Kruglick, Ezekiel J J ; Pister, Knstofer S J

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

5

Issue

1

fYear

1996

fDate

3/1/1996 12:00:00 AM

Firstpage

10

Lastpage

17

Abstract

A class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed. Rigid links, mechanical couplings, and large-force, large-displacement micromotors have been created. Hollow triangular beams made from rotated microhinged polysilicon plates with polysilicon locks can withstand axial loads of up to 2.6 gm. Mechanical couplings with sliding mechanisms are used to rotate hinged structures off the substrate. The typical frictional force observed is approximately 2 μN. Linear electrostatic stepper motors with an estimated force of 6.5 μN at 35 V and a travel of 40 μm have also been demonstrated

Keywords

electrostatic devices; linear motors; micromachining; micromechanical devices; micromotors; robots; silicon; stepping motors; 35 V; 40 mum; Si; articulated microrobots; hollow triangular beams; large-displacement micromotors; large-force micromotors; linear electrostatic stepper motors; micromanipulator robots; polysilicon locks; rotated microhinged polysilicon plates; surface-micromachined components; Electrostatics; Etching; Fasteners; Manipulators; Micromanipulators; Micromotors; Payloads; Robots; Substrates; Testing;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.485210

Filename

485210