Title :
Correction to "Magnetic Microactuation of Polysilicon Flexure Structures" [Erratum]
fDate :
3/1/1996 12:00:00 AM
Keywords :
Actuators; Lifting equipment; Micromagnetics;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.1996.485219