• DocumentCode
    758485
  • Title

    Inhibition of bird´s beak in LOCOS by new buffer N2O oxide

  • Author

    Chao, T.S. ; Cheng, J.Y. ; Lei, T.F.

  • Author_Institution
    Nat. Nano Device Lab., Hsinchu, Taiwan
  • Volume
    31
  • Issue
    4
  • fYear
    1995
  • fDate
    2/16/1995 12:00:00 AM
  • Firstpage
    323
  • Lastpage
    324
  • Abstract
    A new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird´s beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate
  • Keywords
    isolation technology; nitridation; nitrogen compounds; oxidation; silicon; LOCOS; N2O-Si; Si; bird´s beak inhibition; buffer N2O oxide; isolation; silicon substrate;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19950208
  • Filename
    375829
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=758485