A study on the accuracy of surface charge measurement

The measurement of accumulated surface charge for thick specimens requires multipoint probe outputs to establish the inverse calculation for the determination of an unknown charge distribution. Until now, studies on the various errors associated with the measurement have been conducted only for simplified arrangements mainly in axisymmetric geometry where the charged surface is parallel to the ground. We have numerically analyzed a model measurement set-up more comparable to practical conditions by a highly efficient surface charge method. We have studied the effect of probe position, the induction from charge existing not directly beneath the (probe) sensor and the difference in matrix components computed by two numerical methods. In particular, we have studied the accuracy of the reconstructed charge distributions by numerical simulations of the inverse calculation. It has been shown that the assumed measurement errors make much larger differences in the reconstructed charge distributions, although the influence depends considerably on the assumed charge distribution. Reducing the condition number of the matrix improves the accuracy of the inverse calculation for uniform and linearly changing charge distributions