Title :
Plastic micromachining assisted by ultraviolet illumination
Author :
Maleki, Teymour ; Mohajerzadeh, Shamsoddin ; Afzali-Kusha, Ali
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Tehran, Iran
Abstract :
A novel ultra-violet assisted micro-machining technique is presented in which the etching of Poly-Ethylene-Terephthalate substrates is anisotropic in the direction of light illumination in a Di-Methyl-Formamide solution. The effects of solution temperature and light intensity have been studied. An average etch rate of 10 μm/hr is achieved with insignificant mask undercut.
Keywords :
etching; micromachining; plastics; Di-Methyl-Formamide solution; Poly-Ethylene-Terephthalate substrates; etch rate; light intensity; plastic micromachining; solution temperature; ultra-violet assisted micro-machining; ultraviolet illumination; Chemicals; Etching; Lighting; Micromachining; Plastics; Positron emission tomography; Solvents; Substrates; Temperature; Ultraviolet sources;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2003.815129
