DocumentCode
759624
Title
Guest editorial: Special section on the international symposium on semiconductor manufacturing
Author
Uriga, K.
Author_Institution
Texas Instruments Japan
Volume
16
Issue
3
fYear
2003
Firstpage
399
Lastpage
400
Keywords
Copper; Electronics industry; Integrated circuit modeling; Manufacturing processes; Manufacturing systems; Optimized production technology; Production facilities; Semiconductor device manufacture; Technological innovation;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2003.815623
Filename
1219485
Link To Document