DocumentCode
759868
Title
Surface tension-powered self-assembly of microstructures - the state-of-the-art
Author
Syms, Richard R A ; Yeatman, Eric M. ; Bright, Victor M. ; Whitesides, George M.
Author_Institution
Opt. & Semicond. Devices Group, Imperial Coll., London, UK
Volume
12
Issue
4
fYear
2003
Firstpage
387
Lastpage
417
Abstract
Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.
Keywords
micromechanical devices; self-assembly; surface tension; microelectromechanical system; microstructure fabrication; rotational assembly; self-assembly; self-organization; surface tension; Assembly; Biomedical optical imaging; Micromechanical devices; Microstructure; Optical devices; Optical distortion; Optical waveguides; Self-assembly; Shape; Surface tension;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2003.811724
Filename
1219507
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