• DocumentCode
    759868
  • Title

    Surface tension-powered self-assembly of microstructures - the state-of-the-art

  • Author

    Syms, Richard R A ; Yeatman, Eric M. ; Bright, Victor M. ; Whitesides, George M.

  • Author_Institution
    Opt. & Semicond. Devices Group, Imperial Coll., London, UK
  • Volume
    12
  • Issue
    4
  • fYear
    2003
  • Firstpage
    387
  • Lastpage
    417
  • Abstract
    Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.
  • Keywords
    micromechanical devices; self-assembly; surface tension; microelectromechanical system; microstructure fabrication; rotational assembly; self-assembly; self-organization; surface tension; Assembly; Biomedical optical imaging; Micromechanical devices; Microstructure; Optical devices; Optical distortion; Optical waveguides; Self-assembly; Shape; Surface tension;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2003.811724
  • Filename
    1219507