Title :
Electrooptic characteristics of thin-film PLZT waveguide using ridge-type Mach-Zehnder modulator
Author :
Thapliya, Roshan ; Okano, Yasunori ; Nakamura, Shigetoshi
Author_Institution :
Adv. Devices & Mater. Lab., Fuji Xerox Co. Ltd., Kanagawa, Japan
Abstract :
The design, characterization, and drift due to electrical bias (DC drift) of thin-film lanthanum-doped lead zirconate titanate (PLZT) waveguide is reported using a Mach-Zehnder modulator. The mechanism of the electrooptic responses based on hysteresis of the applied field is proposed to understand the behavior of the device. It is shown that the thin film exhibits a Kerr effect having a coefficient value of 5×10-18 (m/V)2. It is reported that by utilizing hydrogen-deficient dry etching, the DC drift is improved by a factor of 3.5. In addition, the verification of the operation of a PLZT-based device for more than 1400 h at 70°C is reported, for the first time.
Keywords :
electro-optical modulation; hysteresis; integrated optics; lanthanum compounds; lead compounds; optical Kerr effect; optical films; optical waveguides; ridge waveguides; 1400 h; 70 degC; DC drift; Kerr effect; Mach-Zehnder modulator; PLZT; PLZT waveguide; PLZT-based device; PbLaZrO3TiO3; applied field; electrical bias; electrooptic characteristics; electrooptic responses; hydrogen-deficient dry etching; hysteresis; ridge-type Mach-Zehnder modulator; thin film; thin-film PLZT waveguide; thin-film lanthanum-doped lead zirconate titanate waveguide; Dry etching; Electrooptic effects; Electrooptic modulators; Electrooptical waveguides; Fabrication; Ferroelectric materials; Hysteresis; Lead; Titanium compounds; Transistors;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2003.815511
