A new technique to determine the average low-field electron mobility in MESFET using C-V measurement

A method to determine the average low-field mobility using the number of electrons available for the conduction based on C-V measurement is proposed. This technique requires neither information of the doping profile in the channel, nor the exact value of the threshold voltage. For a D-mode MESFET, the average electron mobility magnitude is compared with that of the C. Chen and D.K. Arch (1989) method. The technique to determine the average electron mobility in the channel described is much simpler. Based on C- V measurement, good agreement is obtained between experimental data and simulation calculation for the electron density in the channel. Using the proposed method, the dependence of average electron mobility on the gate voltage is also proposed. Using the proposed method for determining the average electron mobility, the effect of a p-buried layer on the mobility was investigated, and is in good agreement with the physical phenomena