DocumentCode
761046
Title
Analytical piezoelectric charge densities in GaAs MESFETs
Author
Huang, Qing-An ; Tong, Qin-Yi
Author_Institution
Microelectronics Center, Southeast Univ., Nanjing, China
Volume
43
Issue
3
fYear
1996
fDate
3/1/1996 12:00:00 AM
Firstpage
509
Lastpage
510
Abstract
The orientation effect in GaAs MESFETs is related to the piezoelectric charge due to stress in overlayers. This brief describes an analytical method for the calculation of the piezoelectric charge in GaAs MESFETs on (100), (011), (1¯1¯1¯)Ga, and (111)As substrates
Keywords
III-V semiconductors; Schottky gate field effect transistors; gallium arsenide; internal stresses; piezoelectricity; GaAs; MESFETs; orientation effect; overlayer stress; piezoelectric charge densities; Circuit simulation; Fabrication; Gallium arsenide; MESFETs; Numerical analysis; Petroleum; Piezoelectric effect; Tensile stress; Threshold voltage; Voltage control;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.485669
Filename
485669
Link To Document