DocumentCode :
762823
Title :
The Influence of Ferromagnetic Target Material on Magnetron Sputtering
Author :
Nishikawa, Ryo ; Gemba, M. ; Ito, H. ; Yamada, T. ; Suzuki, T.
Author_Institution :
Toshiba R&D Center.
Volume :
1
Issue :
1
fYear :
1985
fDate :
4/1/1985 12:00:00 AM
Firstpage :
11
Lastpage :
12
Keywords :
Argon; Chromium; Electrodes; Indium tin oxide; Iron; Magnetic circuits; Magnetic fields; Magnetic materials; Perpendicular magnetic recording; Sputtering;
fLanguage :
English
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
Publisher :
ieee
ISSN :
0882-4959
Type :
jour
DOI :
10.1109/TJMJ.1985.4548429
Filename :
4548429
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=762823
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