DocumentCode

762823

Title

The Influence of Ferromagnetic Target Material on Magnetron Sputtering

Author

Nishikawa, Ryo ; Gemba, M. ; Ito, H. ; Yamada, T. ; Suzuki, T.

Author_Institution

Toshiba R&D Center.

Volume

1

Issue

1

fYear

1985

fDate

4/1/1985 12:00:00 AM

Firstpage

11

Lastpage

12

Keywords

Argon; Chromium; Electrodes; Indium tin oxide; Iron; Magnetic circuits; Magnetic fields; Magnetic materials; Perpendicular magnetic recording; Sputtering;

fLanguage

English

Journal_Title

Magnetics in Japan, IEEE Translation Journal on

Publisher

ieee

ISSN

0882-4959

Type

jour

DOI

10.1109/TJMJ.1985.4548429

Filename

4548429