• DocumentCode
    762990
  • Title

    ULSI process integration v

  • Volume
    54
  • Issue
    4
  • fYear
    2007
  • fDate
    4/1/2007 12:00:00 AM
  • Firstpage
    900
  • Lastpage
    900
  • Abstract
    Provides a listing of upcoming conference events of interest to practitioners and researchers.
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2007.894995
  • Filename
    4142896