DocumentCode
763495
Title
A simplified method for calculation of the impedance of an induction plasma
Author
Chentouf, A. ; Fouladgar, J. ; Develey, G.
Author_Institution
LRTI-CRTT, Saint Nazaire, France
Volume
31
Issue
3
fYear
1995
fDate
5/1/1995 12:00:00 AM
Firstpage
2100
Lastpage
2103
Abstract
A program for PC was developed to calculate the impedance of an RF plasma at the output of the generator. An exponential distribution of current density is assumed inside the inductor. The solution of the electromagnetic equation in the inductor is then associated with the finite-difference method inside the plasma. The finite-difference electromagnetic and heat transfer equations are obtained by the control volume formulations
Keywords
current density; finite difference methods; inductors; physics computing; plasma heating; plasma radiofrequency heating; plasma torches; RF generator; RF plasma; control volume formulations; current density; electromagnetic equation; finite-difference method; heat transfer equations; impedance calculation; induction plasma; Current density; Electromagnetic heating; Electromagnetic induction; Equations; Exponential distribution; Finite difference methods; Impedance; Inductors; Plasma density; Radio frequency;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.376459
Filename
376459
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