The Beenakker´s Cavity for Uniform Column of Nonequilibrium Argon Plasma Generation: Experiment and 3-D Modeling

Author

Tatarinov, Alexey V. ; Epstein, I.L. ; Lebedev, Y.A. ; Cvejic, M. ; Jovicevic, S. ; Konjevic, N.

Author_Institution

Topchiev´s Inst. of Petrochem. Synthesis, Moscow, Russia

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2836

Lastpage

2837

Abstract

In this experiment, a uniform column of nonequilibrium argon plasma (p = 0.5 torr) generated by the Beenakker´s cavity has been studied and self-consistent nonlocal 3-D modeling has been applied. The results of modeling allowed explaining uniformity of long plasma column outside of the cavity. It is found that the nonlocality provides axial homogeneity of such parameters as mean energy density of electrons and concentrations of all plasma particles. Images of plasma properties are presented.

Keywords

argon; high-frequency discharges; plasma density; plasma diagnostics; plasma simulation; plasma sources; Ar; Beenakker cavity; electron mean energy density; nonequilibrium argon plasma generation; plasma column; plasma particle concentrations; plasma properties; pressure 0.5 torr; self-consistent nonlocal 3D modeling; Argon; Cavity resonators; Electron tubes; Mathematical model; Microwave imaging; Optical resonators; Plasmas; Elementary particle exchange interactions; microwave propagation; plasma diagnostics; plasma simulation; plasma sources; plasma sources.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2328017

Filename

6847148