• DocumentCode
    763880
  • Title

    Ultrasonic thin-walled tube wave structure for sensing devices

  • Author

    Li, Xing ; Wang, Zuoqing ; Jen, Cheng Kuei ; Viens, Martin ; Cheeke, J. David N

  • Author_Institution
    Dept. of Phys., Concordia Univ., Montreal, Que., Canada
  • Volume
    43
  • Issue
    2
  • fYear
    1996
  • fDate
    3/1/1996 12:00:00 AM
  • Firstpage
    331
  • Lastpage
    336
  • Abstract
    Theoretical and experimental investigations of thin-walled tube acoustic wave devices for gravimetric sensing applications are presented. Integrated sensor configurations have been demonstrated by employing a sol-gel processed thin piezoelectric lead zirconate titanate (PZT) film. This was coated coaxially on stainless steel tubes and interdigital transducers (IDT) fabricated as the transmitter and receiver on the curved tube surfaces. We have observed tube waves along both the axial and circumferential directions between 1 and 6.6 MHz. We have also analyzed the mass sensitivities of different modes propagating along the tubes and shown that high mass sensitivity can be achieved by keeping the tube wall thin.
  • Keywords
    gravimeters; interdigital transducers; lead compounds; piezoceramics; piezoelectric thin films; sol-gel processing; ultrasonic transducers; 1 to 6.6 MHz; PZT; PbZrO3TiO3; axial directions; circumferential directions; curved tube surfaces; gravimetric sensing applications; high mass sensitivity; integrated sensor configurations; interdigital transducers; mass sensitivities; receiver; sensing devices; sol-gel processed thin piezoelectric PZT film; stainless steel tubes; thin-walled tube acoustic wave devices; transmitter; ultrasonic thin-walled tube wave structure; Acoustic sensors; Acoustic transducers; Acoustic waves; Coaxial components; Piezoelectric films; Piezoelectric transducers; Steel; Thin film sensors; Thin wall structures; Titanium compounds;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.485961
  • Filename
    485961