DocumentCode :
763880
Title :
Ultrasonic thin-walled tube wave structure for sensing devices
Author :
Li, Xing ; Wang, Zuoqing ; Jen, Cheng Kuei ; Viens, Martin ; Cheeke, J. David N
Author_Institution :
Dept. of Phys., Concordia Univ., Montreal, Que., Canada
Volume :
43
Issue :
2
fYear :
1996
fDate :
3/1/1996 12:00:00 AM
Firstpage :
331
Lastpage :
336
Abstract :
Theoretical and experimental investigations of thin-walled tube acoustic wave devices for gravimetric sensing applications are presented. Integrated sensor configurations have been demonstrated by employing a sol-gel processed thin piezoelectric lead zirconate titanate (PZT) film. This was coated coaxially on stainless steel tubes and interdigital transducers (IDT) fabricated as the transmitter and receiver on the curved tube surfaces. We have observed tube waves along both the axial and circumferential directions between 1 and 6.6 MHz. We have also analyzed the mass sensitivities of different modes propagating along the tubes and shown that high mass sensitivity can be achieved by keeping the tube wall thin.
Keywords :
gravimeters; interdigital transducers; lead compounds; piezoceramics; piezoelectric thin films; sol-gel processing; ultrasonic transducers; 1 to 6.6 MHz; PZT; PbZrO3TiO3; axial directions; circumferential directions; curved tube surfaces; gravimetric sensing applications; high mass sensitivity; integrated sensor configurations; interdigital transducers; mass sensitivities; receiver; sensing devices; sol-gel processed thin piezoelectric PZT film; stainless steel tubes; thin-walled tube acoustic wave devices; transmitter; ultrasonic thin-walled tube wave structure; Acoustic sensors; Acoustic transducers; Acoustic waves; Coaxial components; Piezoelectric films; Piezoelectric transducers; Steel; Thin film sensors; Thin wall structures; Titanium compounds;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.485961
Filename :
485961
Link To Document :
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