Title :
Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects
Author :
Hattori, H.T. ; Seassal, C. ; Touraille, E. ; Rojo-Romeo, P. ; Letartre, X. ; Hollinger, G. ; Viktorovitch, P. ; Di Cioccio, L. ; Zussy, M. ; Melhaoui, L.E. ; Fedeli, J.M.
Author_Institution :
Ecole Centrale de Lyon, Lab. d´´Electronique, Ecully, France
Abstract :
A new approach is proposed to realize an optical link for intrachip optical interconnects. This link includes III-V compound-based laser sources and photodetectors, and silicon-on-insulator-based strip waveguides. The heterogeneous integration of an InP-based microdisk laser with a silicon waveguide using SiO2-SiO2 molecular bonding and nanofabrication procedures is emphasized. The technological procedure is described and first experimental results show that, with an adequate configuration, 35% of light could be coupled from the optically pumped microlaser to the waveguide, as a result of the vertical evanescent coupling.
Keywords :
III-V semiconductors; bonds (chemical); indium compounds; integrated optics; integrated optoelectronics; microdisc lasers; nanotechnology; optical interconnections; optical pumping; optical waveguides; photodetectors; semiconductor lasers; silicon compounds; silicon-on-insulator; III-V compound-based laser sources; InP; InP-based laser; Si-SiO2; SiO2-SiO2 molecular bonding; heterogeneous integration; intrachip interconnects; microdisk lasers; nanofabrication; optical interconnects; optical link; optically pumped microlaser; silicon strip waveguides; silicon-on-insulator-based strip waveguides; vertical evanescent coupling; III-V semiconductor materials; Optical coupling; Optical fiber communication; Optical interconnections; Optical waveguides; Photodetectors; Pump lasers; Silicon; Strips; Waveguide lasers; Heterogeneous integration of III–V materials and silicon; microdisk lasers; optical interconnects; semiconductor lasers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.861542
