Title :
Non-contact high resolution microwave scanning measurement technology
Author :
Berger, N. ; Sulzbach, T. ; Kantor, R. ; Shvets, I.V. ; Landstorfer, F.M.
Author_Institution :
Inst. fur Hochfrequenztech., Univ. of Stuttgart, Germany
fDate :
7/10/2003 12:00:00 AM
Abstract :
For non-contact inspection of microwave integrated and hybrid circuits a technical concept and realisation of a high resolution scanning technique for the detection of the electric field distribution has been developed. The near-field signal is measured in magnitude and phase allowing the calculation of the signal flow in the device under test.
Keywords :
inspection; integrated circuit measurement; integrated circuit testing; microwave integrated circuits; microwave measurement; device under test; electric field distribution; hybrid circuits; microwave integrated circuits; microwave scanning measurement technology; near-field signal; noncontact inspection; signal flow;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030705
