Magnetic Properties of Fe-Si-Ru Sputtered Films

The authors studied Fe-Si magnetic thin films with Ru added formed on glass substrates by RF sputtering. Addition of Ru tended to lower the saturation magnetic flux density, but the rate of decrease was smaller than for transition metals such as Cr. The permeability and coercive force remained unaffected. Polarization curve measurements and tests using salt sprays indicated that films with Ru added were more resistant to corrosion. Fe-Si-Ru alloys were obtained with a saturation flux density of about 1.7 T, a permeability of about 500 and a corrosive resistance comparable to that of Ni-Fe alloys.