Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides

Author

Roelkens, G. ; Van Thourhout, Dries ; Baets, Roel

Author_Institution

Dept. of Inf. Technol., Ghent Univ.-Interuniversity MicroElectron. Center, Belgium

Volume

23

Issue

11

fYear

2005

Firstpage

3827

Lastpage

3831

Abstract

We present and numerically analyze two schemes for efficient, large-bandwidth, and fabrication-tolerant optical coupling of bonded III-V membrane active components to an underlying nanophotonic waveguide circuit in silicon-on-insulator (SOI). Coupling of active membrane components to passive waveguides enables the integration of ultracompact passive waveguide circuits and active optoelectronic devices.

Keywords

III-V semiconductors; integrated optics; micro-optics; nanotechnology; optical couplers; optical waveguides; silicon-on-insulator; III-V membrane devices; heterogeneous integration; nanophotonic waveguide; silicon-on-insulator waveguides; Biomembranes; CMOS technology; III-V semiconductor materials; Indium phosphide; Integrated optics; Optical modulation; Optical waveguide components; Optical waveguides; Silicon on insulator technology; Wafer bonding; Heterogeneous integration; nanophotonics; silicon-on-insulator (SOI); thin-film optoelectronic components;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2005.856231

Filename

1561414