Title :
Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides
Author :
Roelkens, G. ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.-Interuniversity MicroElectron. Center, Belgium
Abstract :
We present and numerically analyze two schemes for efficient, large-bandwidth, and fabrication-tolerant optical coupling of bonded III-V membrane active components to an underlying nanophotonic waveguide circuit in silicon-on-insulator (SOI). Coupling of active membrane components to passive waveguides enables the integration of ultracompact passive waveguide circuits and active optoelectronic devices.
Keywords :
III-V semiconductors; integrated optics; micro-optics; nanotechnology; optical couplers; optical waveguides; silicon-on-insulator; III-V membrane devices; heterogeneous integration; nanophotonic waveguide; silicon-on-insulator waveguides; Biomembranes; CMOS technology; III-V semiconductor materials; Indium phosphide; Integrated optics; Optical modulation; Optical waveguide components; Optical waveguides; Silicon on insulator technology; Wafer bonding; Heterogeneous integration; nanophotonics; silicon-on-insulator (SOI); thin-film optoelectronic components;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2005.856231
